| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic multilayer film of a new structure and a method of manufacturing the same. <P>SOLUTION: The magnetic multilayer film includes: a substrate; ferromagnetic layers 501 and 505 which are formed on the substrate and comprise a magnetic alloy containing Co, Fe and B; and polycrystalline MgO 503 whose (001) crystal surface is preferentially oriented on the ferromagnetic layers. The magnetic alloy is one of FeCoB, FeCoBSi and FeCoBP. Also, the manufacturing method includes: a process of preparing the substrate; a process of forming a layer comprising an amorphous magnetic alloy containing Co, Fe and B on the substrate; a process of forming an amorphous MgO layer on the layer comprising the amorphous magnetic alloy; and a process of performing annealing treatment. <P>COPYRIGHT: (C)2012,JPO&INPIT |
