| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate provided with a piezoelectric thin film capable of performing non-destructive characteristic evaluation of the piezoelectric thin film, and provide a manufacturing method of the substrate. <P>SOLUTION: In a substrate provided with a piezoelectric thin film, a lower electrode layer 6 is formed on a substrate 5, and a piezoelectric thin film 2 having a perovskite structure is formed on the lower electrode layer 6. A lower electrode exposure part 3 in which a portion of the lower electrode layer 6 is exposed from the piezoelectric thin film 2 is provided on the lower electrode layer 6 without removing the piezoelectric thin film 2 because the piezoelectric thin film 2 formed on the lower electrode layer 6 is formed on a area narrower than that of the lower electrode layer 6. <P>COPYRIGHT: (C)2012,JPO&INPIT |
