| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle capable of improving dimension stability and retaining an effective exposure area during exposure while securing rigidity to withstand a use as a pellicle frame body. <P>SOLUTION: A pellicle frame body 2 including a rectangular opening 4 in the plan view includes a frame part forming the circumferential edge of the opening 4, and the frame part has a joint portion J formed by joining the ends of the frame part with chemical reaction type adhesive. A pellicle 1 includes the pellicle frame body 2, and a pellicle film 3 extensionally supported to cover the opening 4 of the pellicle frame body 2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
