| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate breaking apparatus which can satisfactorily break a brittle material substrate. <P>SOLUTION: A breaking unit 85 breaks the brittle material substrate 7 of an erected posture which is held on a conveyance unit along a scribing line 8. A first breaking bar 86 is elongated to one direction (longitudinal direction of an insertion hole 81b: elongation direction) along an insertion hole 81b of an attachment stand 81. A plurality of second breaking bars 87 are disposed on the side opposite from the first breaking bar 86 with the workpiece 3 held by a conveyance unit 50 interposed between the first breaking bar 86 and the second breaking bars 87. The breaking bars 87 are each elongated in the direction parallel to the first breaking bar 86. Thus, the first and second breaking bars 86, 87 are arranged on both sides of the brittle material substrate 7 which is held in the erected posture. Thereby, it is not necessary to take countermeasure for reducing an influence of gravity for each first and second breaking bars 86, 87 and the brittle material substrate 7 can be broken satisfactorily. <P>COPYRIGHT: (C)2012,JPO&INPIT |
