| 摘要 |
Embodiments of dual arm substrate transfer robots are provided herein. In some embodiments, a dual arm substrate transfer robot may include a central actuator to rotate the transfer robot about a central axis; a linkage arm having a first end and a generally opposing second end, wherein the linkage arm is coupled to the central actuator proximate a center of the linkage arm between the first and second ends; a first forearm rotatably coupled to the first end of the linkage arm; a second forearm rotatably coupled to the second end of the linkage arm; a first forearm actuator to control the rotation of the first forearm with respect to the linkage arm; and a second forearm actuator to control the rotation of the second forearm with respect to the linkage arm, wherein the first and second forearm actuators are laterally offset from the central actuator. |
