HIGH PRECISION GAS BEARING SPLIT-AXIS STAGE FOR TRANSPORT AND CONSTRAINT OF LARGE FLAT FLEXIBLE MEDIA DURING PROCESSING

摘要

PURPOSE: A high precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing are provided to control z axis position of a media processed during inspection and maintenance of a surface because critical parts for inspection and maintenance support each other to align properly. CONSTITUTION: An operating method of a high precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing is as follows. A first section of a split-axis stage accommodates medium(432). The first section has a first handling precision. In order to arrange the medium into observation area, the medium moves to a first direction by using the first section. The medium is accommodated in a second section of the spilt-axis from the first section. Only the second section has a stability and stiffness supporting structure providing lateral positioning stability. The second section includes more observation areas and has a second handling precision more accurate than the first handling precision. The medium are located in the observation areas according to observation direction by using the second section.