| 摘要 |
<p>A multi-stage vacuum pump 10 which has multiple pumping stages 12, 14, 16, 18, where the pump comprises a stator forming the pumping chambers 32, 34, 36, 38 of respective pumping stages and at least one shaft 40, 42 for supporting multiple rotors 44a, 44b, 46a, 46b, 48a, 48b, 50a, 50b for rotation in respective pumping chambers. The stator comprises a stator envelope 20, which extends over an axial extent of multiple stator stages circumscribing the shaft and forming an internal profile of multiple stator stages, and a plurality of transverse walls 22, 24, 26, 28, 30 located on either axial side of the stator stages to form respective pumping chambers. At least one of the transverse walls is an inter-stage 26, 28, 30 between stator stages and the stator envelope is configured to circumscribe the inter-stage for location of the inter-stage radially inward of the stator part.</p> |
