| 摘要 |
PURPOSE: An inspection device is provided to prevent interference of an exit part and a holding stage because the exit part of a transmission lighting device illuminates to a viewing surface in the exterior of the holding stage. CONSTITUTION: An inspection device(10) comprises an observation optical system(11), a reflective lighting unit(12), a transmission lighting unit(14), and a holding stage(34). The observation optical system determines a viewing surface on an observation optical axis. The reflective lighting unit illuminates the viewing surface from the observation optical system. The transmission lighting unit illuminates the viewing surface from the opposite side of the observation optical system. The holding stage keeps a tape(42) in the transmission lighting unit side and the inner surface of an annular member(43) keeping the tape where an inspection target object is attached. The holding stage is a cylindrical shape.
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