发明名称 VACUUM DEPOSITION SOURCES HAVING HEATED EFFUSION ORIFICES
摘要 The present invention provides electrical contact assemblies can be used with vacuum deposition sources. In one exemplary application, the electrical contact assemblies of the present invention provide electrical contact to an arcuate or otherwise curved surface of a heating device used with a vacuum deposition source.
申请公布号 EP2321443(A4) 申请公布日期 2012.03.14
申请号 EP20090806953 申请日期 2009.08.11
申请人 VEECO INSTRUMENTS INC. 发明人 PRIDDY, SCOTT, W.;BRESNAHAN, RICHARD, C.
分类号 C23C14/24;C30B23/06 主分类号 C23C14/24
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