发明名称 |
A method for driving a scanning probe microscope at elevated scan frequencies |
摘要 |
<p>A method for operating a scanning probe microscope (10) at elevated scan frequencies is disclosed, which comprises a characterization stage, including sweeping a plurality of excitation frequencies of the vertical displacement of the scanning element (T); measuring the value attained by the reading parameter at the excitation frequencies; and identifying plateau regions of the response spectrum of the reading parameter, where the reading parameter variation is limited within a predetermined range over a predefined frequency interval, thereby defining corresponding fast scanning frequency windows (W) in which the microscope assembly is sufficiently stable to yield a lateral resolution comparable to the one obtained during slow measurements. The measurement stage includes driving the scanning element (T) along at least a scanning trajectory over the surface of the specimen (S) at a frequency selected among the frequencies included in a fast scanning frequency window (W).</p> |
申请公布号 |
EP2428804(A1) |
申请公布日期 |
2012.03.14 |
申请号 |
EP20100176633 |
申请日期 |
2010.09.14 |
申请人 |
CONSIGLIO NAZIONALE DELLE RICERCHE |
发明人 |
ESCH, FRIEDRICH;DRI, CARLO;COMELLI, GIOVANNI;AFRICH, CRISTINA;SPESSOT, ALESSIO |
分类号 |
G01Q10/06 |
主分类号 |
G01Q10/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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