PROJECTION OBJECTIVE AND PROJECTION EXPOSURE APPARATUS WITH NEGATIVE BACK FOCUS OF THE ENTRY PUPIL

摘要

PURPOSE: A projection objective lens and a projection exposure apparatus are provided to improve transparency by forming negative back focus of an entrance pupil. CONSTITUTION: A projection objective lens(210) forms an image projecting optical path(213) to an image plane(214) from an object plane(212). The projection objective lens has negative back focus of an entrance pupil. A microlithography projection exposure apparatus guides an illumination bundle(211) propagating to the object plane by crossing the image projecting optical path.