BULK ACOUSTIC WAVE RESONATOR STRUCTURE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A volume acoustic resonator structure and a manufacturing method are provided to reduce power lost through electrodes by the formation of an air cavity on the lower part of the electrodes connecting to a resonator. CONSTITUTION: A first substrate(110) comprises a via hole(113) formed in a fixed region of a lower surface. An insulating layer(115) is formed of insulating materials to expose the fixed region of an electrode pad(117). A first laminate resonant part(120) comprises a first air cavity(121) formed on the top of the first substrate and a first bottom electrode-piezoelectric layer-top electrode laminated on the top of the first air cavity. The second laminate resonant part(130) comprises a second air cavity(131) formed on the top of the first substrate and the second bottom electrode-piezoelectric layer-top electrode laminated on the top of the second air cavity. The first electrode part(140) is formed in order to connect the first laminate resonant part and the second laminate resonant part through the bottom electrode(123) or the top electrode(127).