COATING APPARATUS AND MAINTENANCE METHOD OF THE NOZZLE

摘要

PURPOSE: A coating apparatus and a method for maintaining a nozzle are provided to prevent the attachment of foreign materials in the flow path of the nozzle. CONSTITUTION: A coating apparatus includes a long nozzle and a maintaining unit. The nozzle discharges treating liquid from a discharging hole. The maintaining unit maintains the flow path of the nozzle filled with the solvent of the treating liquid when the nozzle is under a standing by state. The maintaining unit includes a solvent supplying unit and a liquid maintaining side(28a). The solvent supplying unit supplies the solvent to the nozzle. The liquid maintaining side forms a gap between the nozzle and the discharging hole. The interface of the solvent and the nozzle are formed on the outer sides of the nozzle.