发明名称 |
Systems for real-time contamination, environmental, or physical monitoring of a photomask |
摘要 |
Systems for real-time contamination, environmental, or physical monitoring of a photomask. The system includes an electronics package physically mounted to the photomask and a processing device in communication with the electronics package. The electronics package includes a sensor configured to monitor the attribute and generate sensor data. The processing device is configured to analyze the sensor data communicated from the electronics package to the processing device. |
申请公布号 |
US8136055(B2) |
申请公布日期 |
2012.03.13 |
申请号 |
US20080182672 |
申请日期 |
2008.07.30 |
申请人 |
ANDERSON BRENT A.;LEIDY ROBERT K.;RANKIN JED H.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANDERSON BRENT A.;LEIDY ROBERT K.;RANKIN JED H. |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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