| 摘要 |
The controller includes a position commander and an error corrector. The position commander outputs a position command value for moving a moving mechanism. The error corrector includes a feedforward controller and a compensator calculator. The feedforward controller performs a feedforward control of the moving mechanism based on the position command value outputted from the position commander and includes a compensator. The compensator calculator calculates a value to be set as the compensator of the feedforward controller based on the position command value outputted from the position commander. |
