| 摘要 |
An electrostatic comb actuator having reduced in-plane rotation of a tiltable element is disclosed. The actuator has a stator comb electrode and a tiltable rotor comb electrode. The rotor comb electrode fingers extend from an anchor wall running parallel to the axis of rotation of the rotor at a first distance from the axis of rotation. The rotor comb electrode fingers extend towards the axis of rotation for a length that is smaller than the first distance. The stator electrodes are shifted towards the axis of rotation, so that the stator electrode fingers are only partially overlapping with the rotor electrodes fingers. |
