发明名称 |
Illumination system for optical inspection |
摘要 |
Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast. |
申请公布号 |
US8134699(B2) |
申请公布日期 |
2012.03.13 |
申请号 |
US201113069332 |
申请日期 |
2011.03.22 |
申请人 |
NAFTALI RON;GUETTA AVISHAY;FELDMAN HAIM;SHOHAM DORON;APPLIED MATERIALS, INC.;APPLIED MATERIALS ISRAEL, LTD. |
发明人 |
NAFTALI RON;GUETTA AVISHAY;FELDMAN HAIM;SHOHAM DORON |
分类号 |
G01N21/00;G01N21/47;G01N21/88;G01N21/95;G01N21/956;G02B27/48 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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