发明名称 FILM AND MANUFACTURING METHOD AT THE SAME
摘要 PURPOSE: A thin film and a manufacturing method thereof are provided to enhance surface roughness by concentrating particles on an upper part or a lower part of a support material with a density difference. CONSTITUTION: Nano particles(30) are coated on a substrate(10) on which a precursor solution of a mixed support material(20) is prepared. The nano particles are concentrated on an upper part of the precursor solution or arranged by itself by using the density difference of the nano particles and the support material. The support material is solidified. The nano particle increases the surface roughness of a thin film(40) on the upper part of the support material.
申请公布号 KR20120023493(A) 申请公布日期 2012.03.13
申请号 KR20100133200 申请日期 2010.12.23
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 YUN, SUN JIN;LIM, JUNG WOOK
分类号 G02B5/00;G02B1/11;H01L31/042 主分类号 G02B5/00
代理机构 代理人
主权项
地址