| 摘要 |
PURPOSE: A substrate supporting device is provided to support substrates of various sizes. CONSTITUTION: A substrate support module(100) includes stages, substrate support pins, and vacuum suction pads. The substrate support module supports a substrate. A substrate guide module(200) is transferred according to the size of the substrate. The substrate guide module guides a substrate supported by the substrate support module. An align camera module(300) detects an align mark of a substrate which is placed on the substrate support module. |
