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发明名称
RF GROUNDING ASSEMBLY FOR SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR101118467(B1)
申请公布日期
2012.03.12
申请号
KR20100052810
申请日期
2010.06.04
申请人
发明人
分类号
H01L21/687;H01L21/02
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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