| 摘要 |
PURPOSE: A bite wheel is provided to prevent the processing quality of a processed object from being deteriorated by reducing vibration due to the rotation of a bite wheel by arranging a counterbalance with the same weight as the bite unit at a wheel base. CONSTITUTION: A bite wheel(25) is rotated to an arrow direction(R) and cuts a bump formed in a surface of a wafer. The bite wheel is composed of a wheel base(50), a bite unit(26), and a counterbalance(66). The bite unit is attached to the wheel base to be attachable and detachable. The bite unit is composed of a shank(52) and a bite(54) attached to the shank to be attachable and detachable. The counterbalance is formed to have the same weight as the bite unit. |
