METHOD FOR RECIPROCATING A WORKPIECE THROUGH AN ION BEAM,申请号KR20067023080-传众专利搜索

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发明名称	METHOD FOR RECIPROCATING A WORKPIECE THROUGH AN ION BEAM
摘要
申请公布号	KR101123532(B1)	申请公布日期	2012.03.12
申请号	KR20067023080	申请日期	2005.04.05
申请人		发明人
分类号	H01J37/317;A61N5/00;B65H1/00;H01L21/00;H01L21/687	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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