| 摘要 |
<p>The process of producing a handle wafer (10), comprises producing a non-through cavity in the handle wafer, assembling the handle wafer with a supporting substrate, and forming a viewing window in the cavity on an alignment or receiving surface. The window is made of a solid or solidified material. The supporting substrate is removed after forming the viewing window in the cavity by a shearing motion of the handle wafer and the supporting substrate. The handle wafer and the supporting substrate are assembled using a reversible adhesive bond defining the alignment or receiving surface. The process of producing a handle wafer (10), comprises producing a non-through cavity in the handle wafer, assembling the handle wafer with a supporting substrate, and forming a viewing window in the cavity on an alignment or receiving surface. The window is made of a solid or solidified material. The supporting substrate is removed after forming the viewing window in the cavity by a shearing motion of the handle wafer and the supporting substrate. The handle wafer and the supporting substrate are assembled using a reversible adhesive bond defining the alignment or receiving surface. The flat base defines a receiving surface. A part of the thickness of the wafer is eliminated so that the cavity is traversing through thin wafer. A liquid display material, which is then solidified, is inserted in the cavity. Independent claims are included for: (1) a handle wafer; and (2) a process for treating a functional wafer.</p> |
