| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a collet holder capable of mounting a workpiece to a mounting object without breaking or damaging the workpiece. <P>SOLUTION: The collet holder mounts a workpiece 5 to a mounting object by adsorbing the workpiece 5 with a negative pressure applied to a vacuum path of an elastic body seal 8, a tip member 7 and a collet 6. The collet 6 is supported displaceably upward and downward by an elastic supporting mechanism 4, and is piped by the elastic body seal 8 shrinkable upward and downward. Therefore, the collet 6 and a tip member 7 can be sufficiently miniaturized, so as to sufficiently reduce impact force when the workpiece 5 is mounted to the mounting object. <P>COPYRIGHT: (C)2012,JPO&INPIT |
