发明名称 FIXED ABRASIVE GRAIN WIRE SAW DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To solve a problem that in a conventional fixed abrasive grain wire saw device, although there is a technique of blowing off sludge and the like clogged in a wire surface by installing a jetting means that jets a high pressure fluid or an ultrasonic vibration fluid toward a fixed abrasive grain wire running at high speed, or although there is a device of imparting ultrasonic vibration through air or a machining liquid to the wire lines running at high speed, sufficient cleaning effects cannot be obtained in any case of them. <P>SOLUTION: An ultrasonic vibration generator is arranged in the running passage of a fixed abrasive grain wire and an applicator installed in the ultrasonic vibration generator is brought into contact with the running fixed abrasive grain wire to directly apply the ultrasonic vibration to the fixed abrasive grain wire. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012045682(A) 申请公布日期 2012.03.08
申请号 JP20100191547 申请日期 2010.08.27
申请人 TOKURIKI HONTEN CO LTD 发明人 SUZAKI NAOFUMI;YAMAGUCHI YUJI
分类号 B24B27/06;B24B1/04;H01L21/304 主分类号 B24B27/06
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