| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining device capable of reducing cost as compared with a conventional one. <P>SOLUTION: In this laser beam machining device 1 including a machining means 3 to irradiate a workpiece held to a holding means 2 with a laser beam to be machined, the holding means 3 comprises a plurality of holding tables 2a-2d; the machining means 3 includes an oscillation part 4 for oscillating a laser beam, a plurality of optical devices 5a-5d arranged corresponding to the respective holding tables to guide the laser beam to the workpieces held to the holding tables, and a connection part 6 for distributing the laser beam oscillated from the oscillation part 4 to the respective optical devices; and each optical device includes a shutter part 51 for blocking the laser beam at optional timing, and a condensation part 52 for condensing the laser beam on the surface of the workpiece held to the holding table. Output can be effectively utilized in order to distribute the laser beam from the oscillation part 6 to the plurality of optical devices, and cost per one machining point can be reduced as compared with a conventional one. <P>COPYRIGHT: (C)2012,JPO&INPIT |
