| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately control an irradiation amount of charged-particle beams. <P>SOLUTION: A charged-particle beam irradiation device 100 includes: a scanning magnet 3 for scanning a charged-particle beam R on an object 52 to be irradiated; an irradiation amount setting part 11 for setting the irradiation amount of the charged-particle beam R at each of target scanning positions on scanning lines L of the charged-particle beam R scanned on the object to be irradiated by the scanning magnet 3; and a scanning speed setting part 11 for setting target scanning speed of the charged-particle beam at each of the target scanning position based on the set irradiation amount. <P>COPYRIGHT: (C)2012,JPO&INPIT |
