摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly accurate, stable magnetic sensor that has solved the problem of variation in the sensitivity characteristic of a magnetic sensor, caused by the influence as of the displacement of a magnetic convergence plate. <P>SOLUTION: A pair of two square hole elements 12R and 12L, left and right, are provided on a Si substrate 15 with a predetermined distance between them. The magnetic convergence plate 11 is provided on a protection film 16. The magnetic convergence plate 11 is a magnetic substance plate of a circular thin film form, arranged to cover predetermine areas of magnetic sensitive parts 14R and 14L. In the predetermined areas, the centers of H<SB POS="POST">0R</SB>and H<SB POS="POST">0L</SB>of the magnetic sensitive parts 14R and 14L are located on a straight line L passing through the center M<SB POS="POST">0</SB>of the magnetic convergence plate 11. If the lengths of the magnetic sensitive parts 14R and 14L on the straight line L are represented by A, and the lengths, on the straight line L, of the portions in which the magnetic sensitive parts 14R and 14L are protruding from the area of the magnetic convergence plate 11 are represented by B, a relation expressed by 0.15A<B<0.4A is established. <P>COPYRIGHT: (C)2012,JPO&INPIT |