| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic member of which the wafer installation surface does not deform even under a heat cycle, and to provide a method for producing the same. <P>SOLUTION: A ceramic member 10 includes: a base 11 made of a ceramic sintered compact; an electrode 12 which is embedded in the base 11 and is made of tungsten, molybdenum, or an alloy consisting essentially thereof; a metal block 13 which is electrically connected to the electrode 12, is embedded in the base 11, and is made of tungsten, molybdenum, or an alloy consisting essentially thereof; and a power feeding terminal 14 which is joined to the metal block 13 by beam welding and is made of nickel, titanium, copper, or an alloy consisting essentially thereof. <P>COPYRIGHT: (C)2012,JPO&INPIT |
