发明名称 |
METHOD FOR MANUFACTURING A TANDEM SOLAR CELL WITH MICROCRYSTALLINE ABSORBER LAYER |
摘要 |
A tandem solar cell comprising an amorphous top cell and a microcrystalline bottom cell is described, wherein the plasma deposition of the microcrystalline absorber of the bottom cell is being performed in at least two steps, with the RF power density per flow unit of precursor gas in the second step being chosen to be lower than in the first step whilst the flow ratios of diluent and precursor are being kept constant. |
申请公布号 |
WO2012027857(A2) |
申请公布日期 |
2012.03.08 |
申请号 |
WO2011CH00201 |
申请日期 |
2011.09.01 |
申请人 |
OERLIKON SOLAR AG, TRUEBBACH;KUPICH, MARKUS |
发明人 |
KUPICH, MARKUS |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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