| 摘要 |
A liquid recovery apparatus (6) is used in an immersion exposure apparatus and is connected to a liquid immersion member (3), which is disposed at least partly around an optical path of exposure light that passes through an optical member and a liquid between the optical member and an object. The liquid recovery apparatus (6) comprises: a first passageway (61), which is connected to a discharge part (40) of the liquid immersion member that separately discharges the liquid and a gas from a recovery passageway (31) of the liquid immersion member wherethrough the liquid recovered via a recovery port (30) of the liquid immersion member flows, into which the liquid discharged via a first discharge port (41) of the discharge part flows; a second passageway (62), into which the gas discharged via a second discharge port (42) of the discharge part (40) flows; and a first detection apparatus (71), which is disposed in at least part of the second passageway and detects the amount of the gas discharged via the second discharge port. |
