| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact, thin and highly productive crystal oscillator, with sufficiently maintained airtight seal and electric conduction. <P>SOLUTION: The crystal oscillator includes: a crystal vibrator 20 formed of a rectangular-shaped crystal; an LSI mounting cover 30 having an identical external size to the crystal vibrator, and being composed of a crystal or Si having an LSI mounted on a plane facing an upper main plane of the crystal vibrator 20, and connected in lamination to the upper main plane of the crystal vibrator 20 via metal films 26, 34; and a base 40 having an identical external size to the crystal vibrator, and being composed of a crystal or Si having a recess 41 formed to face a lower main plane of the crystal vibrator 20, and connected in lamination to the lower main plane of the crystal vibrator 20 via metal films 27, 44. In the crystal oscillator, the crystal vibrator 20, the LSI mounting cover 30 and the base 40 are electrically connected by respective electrodes provided thereon. In a manufacturing method, the crystal oscillator is manufactured in a wafer level. <P>COPYRIGHT: (C)2012,JPO&INPIT |
