| 摘要 |
PURPOSE: An oxide layer is provided to increases the porous ratio on the surface of the oxide layer by simple process applying vibration to the oxide layer, thereby improving the strength between particles. CONSTITUTION: A manufacturing method of an oxide layer comprises: a step of forming an oxide layer(12) on a substrate(10); a step of applying vibration to the oxide layer; and a step of projecting ultrasonic wave after putting the substrate in which the oxide layer is formed into solution. The solution is water, and the energy of the ultrasonic wave is 100-1000 joule or 300-600 joule. |
