发明名称 |
METHOD OF FABRICATING FINE PATTERN ON SUBSTRATE USING SOLID FILM BARRIER |
摘要 |
PURPOSE: A method for fabricating a fine pattern on a substrate using a solid film barrier is provided to form a fine pattern having a high aspect ratio by controlling the concentration of a functional ink and the thickness of a mask. CONSTITUTION: A filling solution is inserted to an opening(S200). A solid film is formed by a solid portion melted or dispersed by the filling solution(S300). A functional ink is spread to the opening(S400). The spread functional ink is solidified and a fine pattern is formed(S500). A mask is separated from a substrate(S600).
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申请公布号 |
KR20120020932(A) |
申请公布日期 |
2012.03.08 |
申请号 |
KR20100084875 |
申请日期 |
2010.08.31 |
申请人 |
KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
SHIN, DONG YOUN |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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