发明名称 METHOD OF FABRICATING FINE PATTERN ON SUBSTRATE USING SOLID FILM BARRIER
摘要 PURPOSE: A method for fabricating a fine pattern on a substrate using a solid film barrier is provided to form a fine pattern having a high aspect ratio by controlling the concentration of a functional ink and the thickness of a mask. CONSTITUTION: A filling solution is inserted to an opening(S200). A solid film is formed by a solid portion melted or dispersed by the filling solution(S300). A functional ink is spread to the opening(S400). The spread functional ink is solidified and a fine pattern is formed(S500). A mask is separated from a substrate(S600).
申请公布号 KR20120020932(A) 申请公布日期 2012.03.08
申请号 KR20100084875 申请日期 2010.08.31
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 SHIN, DONG YOUN
分类号 H01L21/027 主分类号 H01L21/027
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