| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter which reduces a warp generated on a substrate and improves its resolution, an optical module, and an optical analyzer. <P>SOLUTION: An etalon 5 (A wavelength variable interference filter) comprises a fixed substrate 51; a moving substrate 52 opposing to the fixed substrate 51; a fixed reflection film 56 provided on the fixed substrate 51; a moving reflection film 57 provided on the moving substrate 52, and opposing to the fixed reflection film 56 through a gap; a fixed electrode 541 provided on the fixed electrode 51; and a moving electrode 542 provided on the moving substrate 52, and opposing to the fixed electrode 541. The moving electrode 542 is configured by laminating a compression electrode layer having compression stress and a tension electrode layer having tensile stress. <P>COPYRIGHT: (C)2012,JPO&INPIT |
