发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 The semiconductor device includes a thin film transistor which includes a gate electrode layer, a gate insulating layer over the gate electrode layer, a source electrode layer and a drain electrode layer over the gate insulating layer, a buffer layer over the source electrode layer and the drain electrode layer, and a semiconductor layer over the buffer layer. A part of the semiconductor layer overlapping with the gate electrode layer is over and in contact with the gate insulating layer and is provided between the source electrode layer and the drain electrode layer. The semiconductor layer is an oxide semiconductor layer containing indium, gallium, and zinc. The buffer layer contains a metal oxide having n-type conductivity. The semiconductor layer and the source and drain electrode layers are electrically connected to each other through the buffer layer.
申请公布号 US2012058599(A1) 申请公布日期 2012.03.08
申请号 US201113227585 申请日期 2011.09.08
申请人 YAMAZAKI SHUNPEI;MIYAIRI HIDEKAZU;AKIMOTO KENGO;SHIRAISHI KOJIRO;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;MIYAIRI HIDEKAZU;AKIMOTO KENGO;SHIRAISHI KOJIRO
分类号 H01L21/02;H01L21/20 主分类号 H01L21/02
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