ELECTROMECHANICAL SYSTEMS PIEZOELECTRIC CONTOUR MODE DIFFERENTIAL AND SINGLE -ENDED RESONATORS AND FILTERS

摘要

This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode (2124) at which a first input signal can be provided and a second electrode (2144) at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode (2134) proximate the first electrode of the first conductive layer and a second electrode (2154) proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer (2108) is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes. The device can be used in the transmission (TX) or receiver (RX) path of a duplexer or as balun.