| 摘要 |
<P>PROBLEM TO BE SOLVED: To control a plurality of control systems so that energy consumption does not exceed a specified constant value in a steady state and disturbance suppression characteristics are not impaired as much possible. <P>SOLUTION: The total power suppression control device includes: an allocation total power input section (10) for receiving allocation total power information for specifying power consumption of heaters of a plurality of control loops; a power value acquiring section (11) for acquiring power consumption values of the respective control loops; power suppressing sections (12 to 18) for calculating power margins of the respective control loops from the power consumption values, and calculating operation amount output upper limit values of the respective control loops, based on a ratio of the power margins of the respective control loops with respect to the total power margin, and the allocation total power; and a control section (19-i) provided on the respective control loops for calculating an operation amount, executing upper limit processing of the operation amount, and outputting the upper limit processed operation amount to the heaters of the corresponding control loops. <P>COPYRIGHT: (C)2012,JPO&INPIT |
