| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify a complicated work procedure and provide a charged particle beam device with high operability. <P>SOLUTION: Since it is possible to automatically start up an operation picture and in addition, confirm a work content by: setting and registering, as a work procedure, the order of starting up each operation picture and the condition for proceeding to the next step; and selecting and performing the work procedure registered in advance by an operator, operability is enhanced. By performing operation by the same work procedure, the unity of work among operators can be realized, and the reliability of a result obtained by the work is enhanced. <P>COPYRIGHT: (C)2012,JPO&INPIT |
