发明名称 |
Self-supporting CVD diamond film and method for producing a self-supporting CVD diamond film |
摘要 |
The invention relates to a self-supporting CVD diamond film comprising a plurality of diamond layers (8) lying one over the other, wherein a lower side of each diamond layer (8) is made of diamond having a first average crystal size of 2 to 50 nm, wherein the average crystal size increases within the diamond layer (8) from the lower side to an upper side of the diamond layer (8), and wherein a second average crystal size in the area of the upper side is 50 to 500 nm. |
申请公布号 |
US2012056199(A1) |
申请公布日期 |
2012.03.08 |
申请号 |
US201013138552 |
申请日期 |
2010.03.05 |
申请人 |
ROSIWAL STEFAN;FANDREY JAN;KELLERMANN KARSTEN;LODES MATTHIAS;FRIEDRICH-ALEXANDER-UNIVERSITAET ERLANGEN-NUERNBERG |
发明人 |
ROSIWAL STEFAN;FANDREY JAN;KELLERMANN KARSTEN;LODES MATTHIAS |
分类号 |
H01L29/16;H01L21/20 |
主分类号 |
H01L29/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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