发明名称 Self-supporting CVD diamond film and method for producing a self-supporting CVD diamond film
摘要 The invention relates to a self-supporting CVD diamond film comprising a plurality of diamond layers (8) lying one over the other, wherein a lower side of each diamond layer (8) is made of diamond having a first average crystal size of 2 to 50 nm, wherein the average crystal size increases within the diamond layer (8) from the lower side to an upper side of the diamond layer (8), and wherein a second average crystal size in the area of the upper side is 50 to 500 nm.
申请公布号 US2012056199(A1) 申请公布日期 2012.03.08
申请号 US201013138552 申请日期 2010.03.05
申请人 ROSIWAL STEFAN;FANDREY JAN;KELLERMANN KARSTEN;LODES MATTHIAS;FRIEDRICH-ALEXANDER-UNIVERSITAET ERLANGEN-NUERNBERG 发明人 ROSIWAL STEFAN;FANDREY JAN;KELLERMANN KARSTEN;LODES MATTHIAS
分类号 H01L29/16;H01L21/20 主分类号 H01L29/16
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