METHOD OF COATING A SUBSTRATE FOR MANUFACTURING A SOLAR CELL

摘要

The invention relates to a method of coating a substrate (41) for manufacturing a solar cell (40) in a deposition environment, the method comprising the steps of: a) Depositing a first zinc oxide layer onto a substrate (41), b) Reducing a zinc precursor content in the deposition environment, c) Treating the first zinc oxide layer with a mixture of diborane and water to form a plurality of coating seeds on the surface of the first zinc oxide layer, and d) Depositing a second zinc oxide layer onto the first zinc oxide layer. The method according to the invention allows improving the material quality of silicon layers which may later be grown on such a substrate. Additionally, the light scattering and subsequent light trapping in a respective solar cell may be enhanced by a method according to the invention. The present invention further relates to a solar cell being manufactured according to the invention.