发明名称 P-DOPED SILICON LAYERS
摘要 The invention relates to a method for producing p-doped silicon layers, in particular silicon layers which are produced from liquid silane-containing formulations. The invention also relates to a substrate coated with a p-doped silicon layer. The invention further relates to the use of certain dopants based on boron compounds for p-doping a silicon layer.
申请公布号 WO2012028476(A1) 申请公布日期 2012.03.08
申请号 WO2011EP64279 申请日期 2011.08.19
申请人 EVONIK DEGUSSA GMBH;WIEBER, STEPHAN;PATZ, MATTHIAS;STUEGER, HARALD;LEHMKUHL, JASMIN 发明人 WIEBER, STEPHAN;PATZ, MATTHIAS;STUEGER, HARALD;LEHMKUHL, JASMIN
分类号 H01L21/228;C07F9/50;C23C18/12;H01L21/02;H01L31/18 主分类号 H01L21/228
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