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发明名称
摘要
申请公布号
JPS5837977(B2)
申请公布日期
1983.08.19
申请号
JP19790118880
申请日期
1979.09.18
申请人
GEN ELECTRIC
发明人
MAIKU FUSHIINGU CHANGU;ARUFURETSUDO ROOSUCHI;RICHAADO UIRIAMU KENEDEI
分类号
H01L21/225;H01L21/223;H01L21/761
主分类号
H01L21/225
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