发明名称 APPARATUS
摘要 <p>The present invention relates to an apparatus at least partly cylindrical surface (4, 5). The apparatus com- prises at least one nozzle head (2) comprising one or more first precursor zone (14) for subjecting the surface (4) or the substrate 7 of the cylindrical object (6) to a first precursor and one or more second precursor zone (16) for subjecting the surface (4) of the cylindrical object (6) to a second precursor. According to the present invention the nozzle head (2) is formed as a cylinder having a central axis and a substantially circular circumference comprising the output face, and that the output face is provided one or more first precursor zones (14) and one or more second precursor zones (16).</p>
申请公布号 WO2012028779(A1) 申请公布日期 2012.03.08
申请号 WO2011FI50747 申请日期 2011.08.29
申请人 BENEQ OY;ALASAARELA, TAPANI;SOININEN, PEKKA 发明人 ALASAARELA, TAPANI;SOININEN, PEKKA
分类号 C23C16/455 主分类号 C23C16/455
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