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发明名称
An Apparatus For Gas Supplying System For Processing Large Area Substrate
摘要
申请公布号
KR20120001700(U)
申请公布日期
2012.03.08
申请号
KR20100009125U
申请日期
2010.08.31
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
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