| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide economical polycrystalline silicon having a low surface dust content. <P>SOLUTION: In the polycrystalline silicon containing fractured fragments of polycrystalline silicon, at least 90% of the fractured fragments have sizes described in the specification, silicon dust particle contents are less than 15 ppmw for particle sizes of less than 400 μm, less than 14 ppmw for particle sizes of less than 50 μm, less than 10 ppmw for particle sizes of less than 10 μm and less than 3 ppmw for particle sizes of less than 1 μm, and further, the polycrystalline silicon has surface metal impurities of 0.1-100 ppbw. <P>COPYRIGHT: (C)2012,JPO&INPIT |
