| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide vacuum processing equipment which facilitates maintenance work of parts related to a lifting-lowering member that is lifted and lowered in a vacuum container using a lifting-lowering shaft penetrating through the vacuum container. <P>SOLUTION: Vacuum processing equipment comprises: a cover plate detachably provided in a bottom part of a vacuum container to cover an opening formed in the bottom part, the cover plate through which a lifting-lowering shaft penetrates; a mounting member on which a lower end of the lifting-lowering shaft is detachably mounted below the cover plate; a first lifting-lowering mechanism provided in a first base body, for lifting and lowering the mounting member; a bellows body provided so as to surround the lifting-lowering shaft extended to a lower side of the bottom part, and of which upper end and lower end are detachably fixed to the cover plate and the mounting member, respectively; a second base body fixed to an outside position of the cover plate of the vacuum container; and a second lifting-lowering mechanism provided in the second base body, for lifting and lowering the first base body. <P>COPYRIGHT: (C)2012,JPO&INPIT |
