发明名称 SEMICONDUCTOR DEVICE WITH PADS OF ENHANCED MOISTURE BLOCKING ABILITY
摘要 A semiconductor device is provided having a pad with an improved moisture blocking ability. The semiconductor device has: a circuit portion including a plurality of semiconductor elements formed on a semiconductor substrate; lamination of insulator covering the circuit portion, including a passivation film as an uppermost layer having openings; ferro-electric capacitors formed in the lamination of insulator; wiring structure formed in the lamination of insulator and connected to the semiconductor elements and the ferro-electric capacitors; pad electrodes connected to the wiring structure, formed in the lamination of insulator and exposed in the openings of the passivation film; a conductive pad protection film, including a Pd film, covering each pad electrode via the opening of the passivation film, and extending on the passivation film; and stud bump or bonding wire connected to the pad electrode via the conductive pad protection film.
申请公布号 US2012056322(A1) 申请公布日期 2012.03.08
申请号 US201113293628 申请日期 2011.11.10
申请人 FUJITSU SEMICONDUCTOR LIMITED 发明人 SAIGOH KAORU;NAGAI KOUICHI
分类号 H01L23/48;H01L21/8246 主分类号 H01L23/48
代理机构 代理人
主权项
地址