发明名称 MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING REDUCED EDDY-CURRENT DRAG
摘要 Linear and planar motors, as exemplary electromagnetic actuators, are disclosed that have at least one actively cooled coil assembly. An exemplary assembly includes a coil having first and second main surfaces. Also included is a respective thermally conductive cooling plate in thermal contact with at least one main surface of the coil. A coolant passageway is defined in or on each cooling plate, and a liquid coolant passes through the coolant passageway. The coolant passageway has a primary pattern that is coextensive with at least part of the main surface of the coil. The primary pattern can include a secondary pattern producing coolant flow through the coolant passageway in a manner that reduces eddy-current losses in the cooling plate. The coolant passageway desirably includes. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices provide more effective cooling, with better reliability and ease of maintenance, and reduced eddy-current drag than conventional actuators.
申请公布号 WO2012029998(A2) 申请公布日期 2012.03.08
申请号 WO2011JP70669 申请日期 2011.09.05
申请人 NIKON CORPORATION;BINNARD MICHAEL B.;COAKLEY SCOTT;POON ALEX;TOTSU MASAHIRO;COON DEREK;KHO LEONARD;KESWANI GAURAV;COOPER ALEXANDER;PHARAND MICHEL;BJORK MATT 发明人 BINNARD MICHAEL B.;COAKLEY SCOTT;POON ALEX;TOTSU MASAHIRO;COON DEREK;KHO LEONARD;KESWANI GAURAV;COOPER ALEXANDER;PHARAND MICHEL;BJORK MATT
分类号 H02K3/24 主分类号 H02K3/24
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