WAFER TRAY, SEMICONDUCTOR WAFER TESTING APPARATUS, AND SEMICONDUCTOR WAFER TESTING METHOD

摘要

A wafer tray (60) that holds a semiconductor wafer (100) is provided with: a wafer placing plate (61), on which the semiconductor wafer (100) is to be placed; a tray main body section (62), which supports the wafer placing plate (61) such that the wafer placing plate can slightly move; and a vibration actuator (64), which applies vibration to the wafer placing plate (61).